MicroNano Integration

Front Matter....Pages i-xv
Front Matter....Pages 1-1
Center for Integrated Nanotechnologies (CINT): Science-Base for Future Integrated Systems....Pages 3-9
An Analysis of the Different MEMS Companies’ Business Models....Pages 11-18
MicroNano Technology Services Offering New Market Opportunities to Industry....Pages 19-26
International Country Rankings in US Patented Nanotechnology....Pages 27-35
Financing of MEMS/MOEMS and Nanotechnology in Germany....Pages 37-39
Front Matter....Pages 41-41
Performance Analysis of Low Drift Micro-Machined Gyroscopes for Inertial Navigation Systems....Pages 43-53
Nanoscale and Microsystem-Technology: New Approaches for Thermoelectric Devices....Pages 55-66
Micromixer Module With an Integrated Optical Pressure Gauge....Pages 67-76
Multi-Layer PMMA Microfluidic Systems for Ammonia Detection....Pages 77-78
Nanoscale Materials Meet Microsystems-Technology Metal Oxide Semiconductor Chemical Sensors: From a Simple Resistor to a Tunable Microelectronic Device....Pages 79-80
A New Type of Transducer for Gas and Bio-Sensors....Pages 81-83
Frequency Changes in the Second Derivative of Currant — Voltage Characteristics of SnO 2 -Si the Heterostructures During Gas Adsorption for Different Thickness of the Adsorptive Layers....Pages 85-86
Front Matter....Pages 87-87
Light Processing with Electrostatically Driven Micro Scanning Mirrors and Micro Mirror Arrays....Pages 89-96
New Combination of SiGe RF Amplifier ICs with High-Q MEMS Components for Wireless Communication Radio Transceivers....Pages 97-109
Design and Realisation of an Add-Drop Multiplexer Using Digital Micromirror....Pages 111-112
Front Matter....Pages 113-113
Functionalization of Cantilever Array Sensors Using Ink Jet Deposition....Pages 115-116
Optimized Creation of Monolayers for Parallel Readout of Bead-Based Assays....Pages 117-125
Integrating Molecular Structures into the Macroscopic World by a Combination of Microsystem Technology and Self-Assembly Methods....Pages 127-133
Nanoimprinting — a Key Enabling Technology for BioM EMS and Biomedical Applications....Pages 137-146
Coriolis-Induced Flow Control for Micro-and Nanofluidic Lab-on-a-Disk Technologies....Pages 147-153
Front Matter....Pages 113-113
One-Dimensional Microarrays for Genetic Testing and Diagnostics....Pages 155-162
Front Matter....Pages 163-163
SEMI International Standards Program — Focus on MEMS....Pages 165-168
Extreme Ultraviolet Radiation from Pulsed Discharges:A New Access to “Nanoscopy” and “Nanolytics”....Pages 169-184
Four Point Bending Test of Thin Films in the nm Through to μm Range....Pages 185-191
Methods for the Reconstruction of Atomic Force Microscope Data Based on Morphological Image Processing....Pages 193-204
Optical 3D-Micro Structure Measurement System Based on a Laser Scanning Confocal Microscope....Pages 205-207
Adsorption Sensitivity of Microporus Silicon to Organic and Biomolecules with High Dipole Moment....Pages 209-210
Front Matter....Pages 211-211
Nanoengineered Inorganic/Organic Composite Microcapsules....Pages 213-219
Mounting at the Nanoscale by Addressing Nanostructured Biological Templates — Another Packaging Strategy for Nanoscaled Electronics?....Pages 221-230
New Functional Materials for MicroNano Fabrication and Device....Pages 231-232
Nanoscalic Sol-Gel-Fillers in Fibre-Chip-Adhesives....Pages 233-234
Multilayers and Multicomponents — Layers Produce in Atmosphere of Metalloorganic Compounds of Aluminum in Arc Plasma Discharge of Titanium — New Technology MO PVD-Arc....Pages 235-238
Nanomanipulations in the Optical Near Field....Pages 241-243
Highly Efficient Micro Structuring of Metals, Ceramics and Dielectrics with Nd:YAG and Excimer Lasers....Pages 245-256
Manufacturing Engineering for Nanoproduction....Pages 257-258
Compact Laboratory EUV-Lamps: “In-House Beamlines” for Technologies Based on Extreme Ultraviolet Radiation....Pages 259-261
Laboratory for Machine Tools and Production Technology: A Novel Assembly Method for Chip/Wafer Bumping and Mems Integration....Pages 263-264
Microcontroller Modules for the Modular MEMS Framework MATCH-X....Pages 265-266
Microreliability, Nanoreliability - Issues for MEMS....Pages 269-275
Cost Savings with Micro/Nano-Replication....Pages 277-278
Front Matter....Pages 211-211
Feasibility Study of the Fabrication of 2D Polymer Photonic Crystals by X-Ray Lithography....Pages 279-286
Behaviour of Flexure Hinges for Use as Articulations in High Precision Mechanisms....Pages 287-288
Design Optimisation Applied to a Cantilever Type Piezoresistive Accelerometer....Pages 289-291
Design and Implementation of a Flexible Guiding System in Translation....Pages 293-295
Back Matter....Pages 297-302